@InProceedings{MitmaPillacaTravRami:2019:DeDiCa,
author = "Mitma Pillaca, Elver Juan de Dios and Trava-Airoldi, Vladimir
Jesus and Ramirez, M.",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {Universidade do Vale
do Para{\'{\i}}ba (UNIVAP)}",
title = "Deposition of diamond-like carbon films on interior surface of a
metallic tube with high aspect ratio",
year = "2019",
organization = "International Conference on Metallurgical Coatings and Thin Films
(ICMCTF), 46.",
abstract = "Recently, we have studied the growth of DLC film on the inner
surface of a stainless steel AISI 304 tube with high aspect ratio
(length/diameter = 20) by using the Plasma Enhanced Chemical Vapor
Deposition (PECVD) technique. In this configuration, a tube with
200 cm in length and 10 cm in diameter was used as a reator. The
inlet and the pumping of the gas is performed by both side of the
tube-ends. Thus, in the present work are reports the results about
the effect of the pulse width on the plasma discharge and on the
adherence of DLC film. The coating was performed by using the
pulsed-DC PECVD technique and the acetylene gas, as precursor.
Five samples of AISI 304 were distributed longitudinally on the
tube inner for the film growth and subsequent characterization.
The system was pumped down to a base pressure of 10-4 Torr by a
set of mechanical and diffusion pump. The working pressure was
kept constant at aproximately 3 mTorr in all the experiments. The
voltage was kept at 1 kV (SiH4 plasma) and at 0.7 kV (Ar and C2H2
plasma). The repetition rate was 21 kHz whereas the pulse width
was varied from 5 to 20 µs. Various results were obtained: (a)
high voltages can be applied by using lower pulse width; (b) the
confinament of the plasma is affected; (c) the temperature on the
tube surface was reduced significantly during the plasma
discharge; (d) amorphous carbon hydrogenated (a-C:H) films with a
remarkable improvement on the adherence of the DLC film were
obtained. Results of Raman scattering spectroscopy have shown
dependence of structure and quality of the DLC film with the
longitudinal distribution.",
conference-location = "San Diego, CA",
conference-year = "19-24 May",
language = "en",
urlaccessdate = "27 abr. 2024"
}